| 摘要 |
The drive has a piezoelectric actuator (2) with a base plate (24) in a first housing section, a servovalve (3) in a second housing section, a coupling between the base plate and servovalve and a membrane (6) between the base plate and the housing inner wall and between the first and second housing sections to achieve sealed separation of the two sections . The base plate has an annular groove (243) in the base surface facing the second section with a ring seal (74) on which the membrane rests, whereby the membrane is retained on the base surface by a flat element.
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