SURFACE ACOUSTIC WAVE DEVICE AND ITS MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To easily manufacture a small-sized surface acoustic wave device with high precision. SOLUTION: An auxiliary substrate 102 is provided in a piezoelectric substrate 101 having interdigital electrodes 103, and a reflection border plane 104 to reflect a surface acoustic wave stimulated by the interdigital electrodes 103 is provided in the auxiliary substrate 102 to configure the surface acoustic wave device. In the manufacturing method of the surface acoustic wave device, hydrophilic processing is applied to a surface region of the piezoelectric substrate 101 on which the auxiliary substrate 102 is placed and a joint surface of the auxiliary substrate 102 and the joint surface of the auxiliary substrate 102 is overlapped on the surface region of the piezoelectric substrate 101 via a liquid having a hydroxyl group to join them.