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摘要
申请公布号
JP3071591(U)
申请公布日期
2000.09.14
申请号
JP20000001555U
申请日期
2000.03.08
申请人
发明人
分类号
H01L21/205;C30B25/10;C30B25/16;C30B29/40;F24D11/00;F24D13/02;H05B3/56;(IPC1-7):C30B25/10
主分类号
H01L21/205
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代理人
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地址
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