MANUFACTURE OF ELECTRON SOURCE AND MANUFACTURE OF IMAGE FORMING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an electron source, wherein each electron emission element has a uniform electron emission characteristic by forming uniform electron emission parts throughout almost all the electron emission elements, when current-carrying forming is performed to a conductive film of each of the electron emission elements in forming the multiple electron emission elements on a substrate having a large area. SOLUTION: When current-carrying forming is performed, an inactive gas such as He and N2 is first introduced so that the pressure inside a vacuum chamber 133 is kept constant. Next, an electron source substrate 71 is heated, and a voltage is applied to element electrodes on the electron source substrate 71. While the pressure inside vacuum chamber 133 is kept constant, a reductive or coagulating gas such as H2 is introduced.