| 摘要 |
PROBLEM TO BE SOLVED: To provide semiconductor equipment, which is easily installed, capable of uniform heating for piping in a heating device for a piping necessary to be heated, preventing disconnection due to locally excessive heating of a heater, and eliminating complicated works during maintenance. SOLUTION: This semiconductor manufacturing equipment in which the pipings of a gas supply system and a gas exhaust system communicated with a reaction tube are heated by a piping heating device, is provided with a piping 10 to be heated that is engaged and pinched with/by a groove 17 provided in two highly thermal-conductive metal heating blocks 18 and 19 and a heating means 23 in the heating block. Further, it is provided with a temperature detector 24, so that the calorific power of the heating means is controlled on the basis of the result obtained by the temperature detector.
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