| 摘要 |
PROBLEM TO BE SOLVED: To suppress increase of leakage electrodes even when an SRO film is used as an electrode material, for improved yield and reliability. SOLUTION: A laminating structure is formed wherein, on an Si substrate 30, a ferroelectric film 33 whose main component is PZT is sandwiched between SRO(SrRuO3) electrodes 32 and 35 through a thermally-oxidized SiO2 film 31. Here, the ratio A/B between mol number A of Pb and mol number B of Zr and Ti of PZT (Pb(Zn, Ti)O3) constituting the ferroelectric film 33 is set to be A/B=1.1. |
