| 摘要 |
PROBLEM TO BE SOLVED: To enhance the maintainability, safety or the like, and to improve the yielding by removing foreign matter sticking on the top surface of a glass substrate in a short time by performing a discharging process for the top surface of the glass substrate under atmospheric pressure as a process before the glass substrate is coated with coating liquid. SOLUTION: A glass substrate 10 is processed while conveyed in a processing chamber 20. The processing chamber 20 is surrounded with a housing 21 and gas is supplied into the space closed by an entrance roller 22 and an exist roller 23 from a gas intake 24 and part of the filling gas is discharged continuously from a gas outlet 25. In the processing chamber 20, a discharging device 30 is arranged and as the discharging device, a device is used which applies an AC voltage between an anode electrode 31 and a cathode electrode 32 coated with dielectrics. This device does not carry out discharging under a vacuum condition, but causes a discharging phenomenon like glow discharging under the atmospheric pressure. The top surface of the glass substrate 10 is discharged under the atmospheric pressure before the glass substrate 10 is coated with the coating liquid.
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