| 摘要 |
PROBLEM TO BE SOLVED: To obtain an electric characteristic evaluating device which can accurately measure and evaluate the current-voltage characteristic, capacitance- voltage characteristic, and Hall effect characteristic of a sample and the temperature dependency characteristics of the characteristics with a single device. SOLUTION: An electric characteristic evaluating device is made to have a heating and cooling mechanism 2 which heats and cools a sample 4 composed of an element having a semiconductor circuit, a probe 5 which makes possible the supply and measurement of a voltage and current to all locations of the sample 4, a probe moving mechanism 6, an evacuating mechanism, and magnets 21. Therefore, the device can synthetically measure the voltage-current characteristic, voltage-capacitance characteristic, and Hall effect characteristic of the sample 4 and the temperature dependency characteristics when the temperature of the sample 4 is changed.
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