| 摘要 |
PROBLEM TO BE SOLVED: To rapidly switch an amplitude of a vibration body to an amplitude for magnetism measurement at the time of shifting from interatomic force measurement to the magnetic force measurement. SOLUTION: In this scanning probe microscope, at the time of measuring interatomic force, a switch SWA is turned on, while a switch SWB is turned off. An AC voltage applied between an electrode 11 of a piezoelectric element 3 and a cantilever 1 has a frequency nearly corresponding to a characteristic frequency of the cantilever 1, while an amplitude of the AC voltage is controlled to vibrate a probe 2 such that the probe 2 comes into an area where the interatomic force acts between the probe 2 and a sample 4. At the time of measuring magnetic force, the switch SWA is turned off, while the switch SWB is turned on. The AC voltage having the amplitude controlled for the magnetic force measurement is inverted and applied between the electrode 11 of the piezoelectric element 3 and the cantilever 1.
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