| 摘要 |
PROBLEM TO BE SOLVED: To enhance the angular velocity detecting accuracy of an oscillator sensor. SOLUTION: Three regular triangular posts A, B, C are cut from piezoelectric elements 2, 3 each having a bimorph structure slightly chamfered at the top and arranged in a direction to form two pairs of tuning forks, exciting electrodes 4, 5 commonly using a Coriolis detection electrode are disposed on two adjacent faces of the regular triangular post, two monitor electrodes 6 serving as exciting electrodes are disposed on the other one face, and a sandwich electrode 7 is disposed on a bimorph intermediate surface. A voltage is applied to the exciting electrodes 4, 5 of the posts A, C to detect the Coriolis force from the electrodes 4, 5 of the post B wherein because the post B bends in the reverse direction to the posts A, C, the angular moment exerted on a fixed part due to the Coriolis force can be cancelled to raise the angular velocity detection accuracy. |
