发明名称 HIGH BREAKDOWN STRENGTH SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a breakdown withstanding semiconductor device with good breakdown withstanding strength even when an electric charge like sodium ion is attached to an outer side of an insulating film. SOLUTION: A breakdown withstanding semiconductor device includes a first diffusion layer 23 and a second diffusion layer 24 with a space in between on an upper face of a semiconductor substrate 21, a first insulating film 26 formed between the first and second diffusion layers 23 and 24 at an upper part of the semiconductor substrate 21, a shield film 28 obtained from a conductive film and formed on the first insulating film 26, and a second insulating film 29 formed on the shield film 28.
申请公布号 JP2000252459(A) 申请公布日期 2000.09.14
申请号 JP19990048666 申请日期 1999.02.25
申请人 TOSHIBA CORP 发明人 TSUCHIYA MASANOBU;SATO SHINGO;OSAWA AKIHIKO
分类号 H01L29/861;H01L29/78;(IPC1-7):H01L29/78 主分类号 H01L29/861
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