| 摘要 |
PROBLEM TO BE SOLVED: To greatly reduce inspection period, by reading one or more inspection results of a previous inspection performed before a target inspection, determining a priority of inspection places for the target inspection based on the read inspection results, and performing the target inspection according to the priority of the determined inspection places. SOLUTION: A value of element resistance measured prior to a lighted inspection is read in a memory of a control device 209. Difference between the measured value and the designed value of the element resistance is calculated. A priority of positions to be inspected about lighting according to magnitude of the calculated difference, the resulted positions are arranged in the ascending order of the priority to create a table, and the table is stored in the memory of the control device 209. A CCD camera 203 is moved to the highest region in priority in the table. Brightness data for each individual picture element lighted by impression of a voltage pulse is provided from images of the CCD camera 203, difference between the brightness data and the designed brightness is calculated. When the calculated difference is not less than a prescribed constant, the picture element is discriminated defective.
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