| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide uniform electron emission characteristic by burying an electrode material in a groove part formed on the surface of a substrate so as to be flush with the substrate surface, and forming a conductive film thereon. SOLUTION: A substrate is irradiated with an ultraviolet laser 1, and a desired electrode form part thereof is thinly removed to form a groove 2' and a groove 3'. An electrode material is deposited and applied to the whole surface of the substrate 1 by vacuum evaporation, sputtering, printing or the like, and the substrate surface is then polished, so that the electrode material is embedded and is flush in the part of the grooves 2' and 3' to form element electrodes 2 and 3 in the state embedded in the substrate 1. An organic metal solution is applied onto the substrate 1 to form an organic metal film 4'. As the organic metal solution, a solution of an organic compound containing a metal of the material of a conductive film 4 as the main element is used. The organic metal film 4' is heated and baked, and patterned through liftoff, etching or the like to form the conductive film 4.</p> |
