| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an element having high electron emitting efficiency and stable electron emitting characteristic over a long time by increasing the conductivity of a pair of films, having carbon which are connected to a pair of electrodes, respectively, and partitioned by a first clearance part toward the first clearance part. SOLUTION: A pair of films having carbon is electrically connected to electrodes via a conductive thin film 4 arranged between the electrodes, and the conductive thin film 4 has a second clearance part between the electrodes. A first clearance part 8 is arranged within the second clearance part, and the narrowest part in the vertical direction to a base body surface of the first clearance part 8 is preferably located on the end part distant from the base body surface. An electron emission part 5 is formed of films 21 and 22 having carbon, which are opposed with the first clearance part 8 between, and a substrate recessed part 23 having carbon atom by passing through activation process. The film present in the narrowest position of the first clearance part 8 has a thickness of 100 nm or less, the carbon is graphite carbon, and a Pd fine particle film is suitably used as the conductive thin film.</p> |
