| 摘要 |
PROBLEM TO BE SOLVED: To make a sensor element to be close to a scribe line in a short time. SOLUTION: This semiconductor sensor is made by forming a plurality of sensor elements isolated in a P area on a semiconductor substrate 1 in a line and scribing them at a unit of the specified number of sensor elements. In this case, P+ areas 5 and 6 for isolation adjacent to a scribe line 4 are formed more shallowly than other areas 3A, 3B and 3C for isolation. |
