发明名称 EXPOSURE DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an exposure device by which an image is accurately recorded with high resolution by effectively radiating light from a light source to a rectangular light radiation area. SOLUTION: This device executes pattern exposure for the thin film of a photosensitive material formed on the surface of a base plate 18 by radiating the light to a rectangular base plate 18 through a photomask 17 having a rectangular pattern area, and is provided with the light sources 12a and 12b and elliptic mirrors 13a and 13b respectively making a pair, a turn-back mirror 14, a compound lens 6 and a pair of collimating mirrors 15 and 16. The light transmitted through the compound lens 6 is converted into parallel light by the collimating function of the collimating mirrors 15 and 16 and is radiated to the photomask 17.
申请公布号 JP2000250223(A) 申请公布日期 2000.09.14
申请号 JP19990052112 申请日期 1999.03.01
申请人 DAINIPPON KAKEN:KK 发明人 SHIMOMURA ICHIRO;OISHI SUSUMU;KONO TAKESHI
分类号 H01L21/027;G03F7/20;(IPC1-7):G03F7/20 主分类号 H01L21/027
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