LASER OSCILLATION DEVICE, ALIGNER AND MANUFACTURE THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a laser oscillation device on which the diffusion of a plasma formed on a slot can be suppressed, and a uniform laser suppressing energy loss as much as possible can be emitted. SOLUTION: In this laser oscillation device, a plasma is grown by stimulating the laser gas in a laser tube by introducing electromagnetic wave from a wave guide 1 through a plurality of microscopic gaps 10 formed on the wall of the waveguide, and a laser beam is generated by resonating the light emitted from the plasma. A mesh shield 13 is provided in the laser tube so that the plasma stimulated on the microscopic gaps 10 is not diffused to outside the prescribed region. As the grown plasma can be suppressed to diffuse to outside the mesh shield 13, a plasma growing operation can be performed by utilyzing the introduced power to the maximum.