| 摘要 |
PROBLEM TO BE SOLVED: To highly accurately execute positioning at a matching part. SOLUTION: This device is provided with a rough positioning part 10 roughly positioning a substrate B, an exposure part (an exposure lamp 26 and an exposure table 27) forming a conductor pattern at the substrate B, a carrying part 30 carrying the substrate B roughly positioned by the part 10 to the exposure parts (the lamp 26 and the table 27), a CCD camera 16 to pick up the mark M1 of the substrate B at the part 10 by a wide visual field, the CCD camera 22 to pick up the mark M2 of an original plate and the mark M1 of the substrate at the exposure parts 26 and 27 by high magnification and an XYθ3-axis table 25 by which the original plate and the substrate B are accurately positioned at the exposure parts 26 and 27 based on the output of the CCD camera 22. Then, the CCD camera 22 is moved by a camera moving part 23 and the original plate is moved by the exposure table 27 based on the output of the CCD camera 16, whereby a position is adjusted so that the mark M1 and the mark M2 get in the image pickup area of the CCD camera 22.
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