| 摘要 |
PROBLEM TO BE SOLVED: To highly accurately detect a wiring pattern formed on a substrate. SOLUTION: A binary image based on three threshold values composed of a basic threshold value th1, a threshold value thL for detecting a lacked system defect (pinhole defect, for example,) and a threshold value thH for detecting an excessive system defect (scatter defect, for example,) and a secondary differentiation binary image based on secondary differentiation threshold values th2 and th3 for hairline short-circuitting or hairline disconnection detection, for example, are logically synthesized so that the binary image of the exact wiring pattern can be detected. The detection conditions of the lacked system defect or excessive system defect can be individually set. Thus, these respective threshold values are set optimum, the difficult fine pinhole defect or the like can be stably detected and a precise pattern check can be realized. |
