发明名称 ELECTRON EMISSION ELEMENT, ELECTRON SOURCE, IMAGE FORMING DEVICE, MANUFACTURE OF THEM AND ELECTRON SOURCE MANUFACTURING DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide an electron emission element, having a good electron emission characteristic, an electron source high in uniformity, and an image formation device having high uniformity and good display quality, to provide their manufacturing methods capable of manufacturing them with a high yield, and to provide an electron source manufacturing device. SOLUTION: This manufacturing method of an electron emission element has a process for forming a pair of element electrodes 2, 3 on a substrate 1, a process for spraying a chemical solution to the surface of the substrate having the element electrodes 2, 3 formed to surface-treat it, a process for applying a solution containing an organic metal to the substrate 1, a process for forming a conductive film 4 by thermally decomposing the applied solution, and a forming process for forming an electron emission part 5 on the conductive film 4 by carrying a current between the element electrodes 2, 3.</p>
申请公布号 JP2000251670(A) 申请公布日期 2000.09.14
申请号 JP19990047323 申请日期 1999.02.25
申请人 CANON INC 发明人 KOJIMA MAKOTO
分类号 H01J9/02;H01J1/316;H01J31/12;(IPC1-7):H01J9/02 主分类号 H01J9/02
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