摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electron emission element, having a good electron emission characteristic, an electron source high in uniformity, and an image formation device having high uniformity and good display quality, to provide their manufacturing methods capable of manufacturing them with a high yield, and to provide an electron source manufacturing device. SOLUTION: This manufacturing method of an electron emission element has a process for forming a pair of element electrodes 2, 3 on a substrate 1, a process for spraying a chemical solution to the surface of the substrate having the element electrodes 2, 3 formed to surface-treat it, a process for applying a solution containing an organic metal to the substrate 1, a process for forming a conductive film 4 by thermally decomposing the applied solution, and a forming process for forming an electron emission part 5 on the conductive film 4 by carrying a current between the element electrodes 2, 3.</p> |