| 摘要 |
PROBLEM TO BE SOLVED: To form a uniform lubricant film with less fluctuation of thickness on a protection film surface by dipping, to form a lubricant film, a substrate with a protection film into a lubricant agent solution within a closed vessel, subsequently introducing an inert gas into the closed vessel, and then pressurizing the closed vessel to exhaust the lubricant agent solution. SOLUTION: After setting a substrate 4 with a disk type protection film on a supporting base 3 with the substrate surface provided vertically, a cover of the pressurizing vessel 1 is closed to supply the lubricant agent solution 5 to a coating tank 2 through a supply pipe 7 from the solution tank 6 in order to dip the substrate 4 with protection film as a whole under the lubricant agent solution 5. Here, the inert gas such as nitrogen and air is supplied to the pressurizing vessel 1 via the gas pipe 10 by opening a gas supply valve 11. Subsequently, an exhaust valve 13 is opened to turn the lubricant agent solution 5 to the solution tank 6. Gas pressure in the pressurizing vessel 1 is adjusted to adjust an exhaust rate of the lubricant agent solution 5 in order to adjust the velocity at the surface of substrate 4 with protection film that is gradually exposed from the lubricant agent solution to control the thickness of the lubricant film.
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