| 摘要 |
<p>PROBLEM TO BE SOLVED: To allow laser scribe at high separation resistance by forming a separation groove at a par of a thin-film photoelectric conversion unit and second electrode layer, and separating an element part from a first electrode tapping part. SOLUTION: A rear surface electrode 4 which is a first electrode layer, photoelectric conversion unit 5, and front surface electrode 6 which is a second electrode layer are sequentially film-formed on a substrate 1. An isolation groove 8 is provided at a part of the photoelectric conversion unit 5 and front surface electrode 6, and the isolation groove 8 isolates an element part from the rear surface electrode 4 tapping part. A grid electrode 7 is formed on the front surface electrode 6 of the element part, and the rear surface electrode 4 tapping part is electrically connected to an electrode 9 by metalization. Thus, laser scribe at high separation resistance is allowed with no cleaning process required.</p> |
