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发明名称
Charged particle beam slit assembly
摘要
申请公布号
EP0785567(B1)
申请公布日期
2000.09.13
申请号
EP19970300207
申请日期
1997.01.15
申请人
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES INC.
发明人
JOST, JONATHAN A.;MACK, MICHAEL E.;KLOS, LEO V.
分类号
H01J37/09;H01J37/317;H01L21/265;(IPC1-7):H01J37/09;H01J37/05
主分类号
H01J37/09
代理机构
代理人
主权项
地址
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