| 摘要 |
An accelerometer (2) formed from a semiconducting substrate (32) and first (31) and second (33) active layers coupled to the opposite surfaces (27, 29) of the substrate (32). The substrate (32) has a frame (4, 6, 8) and a proof mass (18) suspended from the frame (8) by one or more flexures (14, 16) for rotation about an input axis (20) in response to an applied force. The active layers (31, 33) each include a vibratory force transducer (22, 24) mechanically coupled to the proof mass (18) for detecting a force applied to the proof mass (18). With this configuration, the transducers (22, 24) are located on either side of the substrate (32), which improves the differential design symmetry of the force detecting apparatus. This reduces the common mode non-linear response characteristics of the accelerometer (2), particularly in high dynamics applications, where high performance is required. |
