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发明名称
RAPID THERMAL PROCESSING (RTP) SYSTEM WITH GAS DRIVEN ROTATING SUBSTRATE
摘要
申请公布号
EP1034561(A1)
申请公布日期
2000.09.13
申请号
EP19980956932
申请日期
1998.11.18
申请人
STEAG RTP SYSTEMS GMBH
发明人
ASCHNER, HELMUT;HAUKE, ANDREAS;WALK, ULRICH;ZERNICKEL, DIETER
分类号
H01L21/205;C23C16/458;C23C16/48;C30B31/12;C30B31/14;H01L21/00;H01L21/26;H01L21/683;(IPC1-7):H01L21/00;H01L21/324;C30B25/10;C30B25/12
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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