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经营范围
发明名称
A process for device fabrication using an energy sensitive composition
摘要
申请公布号
EP0653681(B1)
申请公布日期
2000.09.13
申请号
EP19940308228
申请日期
1994.11.09
申请人
AT&T CORP.
发明人
HOULIHAN, FRANCIS MICHAEL;KATZ, HOWARD EDAN;SCHILLING, MARCIA LEA
分类号
G03F7/039;G03F7/004;H01L21/027;(IPC1-7):G03F7/038
主分类号
G03F7/039
代理机构
代理人
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