发明名称 |
Method for improved metal oxide bonding of optical elements |
摘要 |
A method of preparing a supporting substrate of an optical subassembly for metal-oxide bonding an optical element to the substrate. The method includes providing a supporting substrate including a metalized region for metal-oxide bonding an optical element to the substrate and rinsing the substrate in a potassium hydroxide solution. The potassium hydroxide solution removes any excess metal oxide or other contaminants from the surface of the metalized region.
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申请公布号 |
US6117794(A) |
申请公布日期 |
2000.09.12 |
申请号 |
US19980008640 |
申请日期 |
1998.01.16 |
申请人 |
LUCENT TECHNOLOGIES, INC. |
发明人 |
DORMER, JAMES F.;OSENBACH, JOHN WILLIAM;ECKER, MARILYN MARKEY |
分类号 |
H01S5/02;H01S5/022;(IPC1-7):H01L21/302 |
主分类号 |
H01S5/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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