Ion beam working apparatus

摘要

An ion beam working apparatus which can carry out a plurality of workings with good accuracy automatically is provided. When an ion beam current is changed, by setting differences in ion beam optical conditions, working without focal point shift or working position shift becomes possible and throughput increases can be expected. Differences in ion beam optical conditions of when an ion beam current is changed are stored in a computer and when the ion beam current amount is changed midway through automatic working those stored differences in ion beam optical conditions are set in the ion beam optical system.