SF6 GAS RECOVERY DEVICE

摘要

PROBLEM TO BE SOLVED: To recover SF6 gas from a container from which gas is recovered without leaking into an atmosphere by providing a constant gas pressurizing part for feedstock gas, an adsorption cylinder for gas to be removed, a PSA gas separation part consisting of valves, a pressurizing pump for separated/concentrated gas, a pressurized gas cooler and a liquefying tank for storing pressurized/cooled gas. SOLUTION: A feedstock gas is supplied to a constant gas pressurizing part 2 from a container 1 from which gas is recovered to make the gas pressure constant and the gas is fed to a PSA gas separation part 3. Next, the separated and concentrated SF6 gas is introduced into a buffer tank 4 and is pressurized by a pressurizing pump 5 to be introduced into a liquefying part 6. After that, the SF6 gas is liquefied and recovered. In this case, when the container 1 has a lowered pressure, a valve 13 is closed and a valve 14 is opened and the gas is recovered while the pressure is maintained in the gas using a vacuum pump 10 and a pressurizing pump 11. Next, the gas introduced from the constant gas pressurizing part 2 is guided into an adsorption cylinder 23 to adsorb nitrogen gas with the help of an adsorbent. In addition, the valves 13, 14 are switched and the gas is separated using another adsorption cylinder 24 and at the same time, the adsorbed nitrogen gas in the adsorption column 23 is adsorbed and released so that the gas is regenerated.