| 摘要 |
PROBLEM TO BE SOLVED: To judge the abnormality of a heater for heating a treatment tank correctly without installing a dedicated detection means. SOLUTION: When a heater H for heating a treatment tank is turned on, the abnormality of the heater H is to be judged. Temperatures T1, T2 detected by a temperature sensor 5 set for detecting the temperature of the heater H are measured at a prescribed interval, and the difference (T2-T1) is a prescribed standard temperature difference T0 of below. When this is found to continue three times, it is judged that there is abnormality in the heater H, and abnormality display LED is turned on and off to inform the abnormality to a user, and the passage of an electric current through the heater H is stopped.
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