| 摘要 |
PROBLEM TO BE SOLVED: To provide a ferroelectric oxide precursor composition of high- molecular weight containing Ti, Zr, and Pb as a construction metal element, and manufacture thereof, and further, manufacture of a PZT ferroelectric thin film which is made thicker. SOLUTION: A titanium alkoxide having an at least 4C alkoxyl group is hydrolyzed and condensed in a solvent containing an at least 4C alcohol to produce a polytitanoxane intermediate. The polytitanoxane intermediate is reacted with a polyzirconoxane, and then with a lead alkoxide raw material to produce a precursor of a number average molecular weight of at least 963. A ferroelectric oxide precursor is applied onto a base to form a gel film on the base, and thereafter, calcined the resulting to produce a ferroelectric thin film which is made thicker. |
