| 摘要 |
<p>PROBLEM TO BE SOLVED: To simplify production in a liquid delivery system, reduce pollution due to liquid, and improve miniaturization and safety, by providing a supply container, an intermediate accumulation container, a delivery container, and a control means individually applying delivery pressure or charging pressure to the respective containers. SOLUTION: A delivery system is provided with an upper stream supply part 1 and a lower stream delivery part 2, for delivering extra pure liquid to a user network 100. The upper stream supply part 1 comprises two supply containers or drums 3A, 3B, a device maintaining gas overpressure against them, a tap line 9 provided with a valve from between two filters 7, 8 for recirculating liquid, and the like. Meanwhile, the lower stream delivery part 2 comprises an accumulation tank, two delivery containers 12A, 12B connected in parallel, and the like. Both containers 12A, 12B are connected to an immersion pipe 13 taking the liquid out of the tank 11, and connected to a line 14 delivering the liquid.</p> |
