| 摘要 |
PROBLEM TO BE SOLVED: To prevent the temperature of the outer periphery part of a silicon single crystal rod under pulling from a silicon molten liquid from being rapidly decreased to suppress the generation of thermal stress in the silicon single crystal rod. SOLUTION: A silicon molten liquid 12 is stored in a quartz crucible 13 installed in a chamber, and a heat-shielding member 36 having a cylindrical part 37 surrounding the outer periphery of a silicon single crystal rod 25 pulled from the silicon molten liquid 12, and positioned so that the lower end thereof may be at the upper side of the silicon molten liquid 12 so as to form a distance therefrom is installed. An expanding part 41 is formed at the lower part of the cylindrical part 37, and is constituted of a ring-like bottom wall 42 connected to the lower part of the cylindrical part 37 and reaching the neighborhood of the outer periphery of the silicon single crystal rod 25, a cylindrical vertical wall 44 connected to the inner edge of the bottom wall 42 so as to form a prescribed distance from the outer periphery of the silicon single crystal rod 25, and an upper wall 46 having a diameter regulated so as to become larger according to coming upward and the upper end keeping contact with the inner periphery of the cylindrical part. A heat-reserving member 47 is packed in the interior of the expanded part.
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