发明名称 Method for protecting a transistor gate from charge damage
摘要 A method and apparatus for preventing charge damage to a protected structure during processing of a semiconductor device. A first source/drain region of a protection transistor is coupled to a protected transistor gate. A second source/drain region of the protection transistor is coupled to ground. The protection transistor is then turned on during the processing of the device to ground the protected transistor gate.
申请公布号 US6117714(A) 申请公布日期 2000.09.12
申请号 US19990363244 申请日期 1999.07.28
申请人 INTEL CORPORATION 发明人 BEATTY, TIMOTHY S.
分类号 H01L23/60;(IPC1-7):H01L21/28;H01L21/306 主分类号 H01L23/60
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