METHOD AND APPARATUS FOR PRODUCING SINGLE CRYSTAL

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus therefor for producing a single crystal, intended to diminish defects tending to be introduced thereinto. SOLUTION: This method comprises providing a pair of upper and lower circular coils 17, 18 for applying a cusped magnetic field to a silicon melt 27 in a crucible 11 and pulling a silicon single crystal 31 from the silicon melt 27 while applying the magnetic field to the melt 27, wherein respective electric currents to be applied to the pair of circular coils 17, 18 are controlled individually to control the magnetic field intensity on the crystal growth surface 32 nearly at a constant level.