发明名称 Thin film transistor with reduced hydrogen passivation process time
摘要 A thin film field effect transistor includes source and drain regions, an active region sandwiched by the source and drain semiconductor regions. A gate insulating film is provided to cover the source and drain regions and the active region, and a semiconductor gate is formed on the gate insulating film above the active region. A gate electrode is formed on the semiconductor gate such that a non-covering portion where the gate electrode does not cover the semiconductor gate is formed.
申请公布号 US6118139(A) 申请公布日期 2000.09.12
申请号 US19980207156 申请日期 1998.12.08
申请人 NEC CORPORATION 发明人 YUDA, KATSUHISA
分类号 H01L21/324;H01L21/28;H01L21/30;H01L21/336;H01L29/423;H01L29/786;(IPC1-7):H01L29/00 主分类号 H01L21/324
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