| 摘要 |
PROBLEM TO BE SOLVED: To provide a micropump to facilitate positioning of joining of a piezoelectric element with a diaphragm, improve unevenness in the discharge characteristics of a micropump, improve workability, and also improve a yield. SOLUTION: This micropump comprises a diaphragm base plate 2 having a diaphragm 1; a valve base plate 3; and a valve base plate 4. A suction valve 5 is formed at the valve base plate 3 and a discharge valve 6 at the valve base plate 4. An island-form protrusion part 9 smaller than an electrode plate 8 formed at a piezoelectric element 7 is formed on the diaphragm 1 of the diaphragm base plate 2. By situating the island-form protrusion part 9 smaller than the piezoelectric element electrode plate 8 at the joint of the piezoelectric element 7, unevenness in a displacement amount of the diaphragm 1 is reduced even when displacement in a joint position between the piezoelectric element 7 and the island-form protrusion part 9 occurs, and unevenness in the discharge characteristics of the pump is reduced.
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