| 摘要 |
PROBLEM TO BE SOLVED: To perform stripping off metal coating films stuck on the surface of support parent material for jigs for a vapor deposition device such as a shield frame, a sidewall plate, a shutter plate or the like used in sputter vapor deposition and thorough washing efficiently and in good finish conditions to realize recycling. SOLUTION: Jig supporting parent material having the metal coating films of vapor deposited stuck material on the surface thereof is subjected to ultrasonic vibration washing treatment 10 in advance. Next, liquid honing treatment 12 and ultrasonic finish washing treatment 14 are performed to strip off the metal coating films stuck on the support parent material, and furthermore rinsing with pure water or distilled water, drying and packing are performed to realize recycling.
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