发明名称 DEVICE FOR PRODUCING CRYSTAL AND METHOD FOR PRODUCING CRYSTAL
摘要 PROBLEM TO BE SOLVED: To provide a device for producing a crystal, capable of stabilizing the position of a solid-liquid interface and stably producing even a large diameter crystal having a diameter of >=300 mm, and to provide a method for producing the crystal. SOLUTION: This device for producing a crystal has a crucible 3 for receiving a raw material and heaters 1a, 1b disposed so as to surround the crucible 3 in an oven, and can lower the crucible 3 to cool the melted liquid 4 of the raw material from the lower side to produce the crystal. Therein, the device is provided with a control system 7 for controlling the inner temperature of the oven to place the melting point temperature position of the raw material 4 in the oven within a constant range (A-B) without relating to the position of the crucible 3.
申请公布号 JP2000247772(A) 申请公布日期 2000.09.12
申请号 JP19990051070 申请日期 1999.02.26
申请人 CANON INC 发明人 AMAMIYA MITSUAKI
分类号 C30B11/00;(IPC1-7):C30B11/00 主分类号 C30B11/00
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