| 摘要 |
PROBLEM TO BE SOLVED: To provide a palladium alloy film which is used for transmitting hydrogen formed on the surface of a porous support by using a vacuum deposition device while controlling it in a desired or prescribed constituent ratio. SOLUTION: This Pd alloy film consisting of Pd and a metal alloyed with Pd, is formed on the surface of a porous support by using a vacuum deposition device having at least two evaporation sources, i.e., an evaporation source for evaporating Pd and another evaporation source for evaporating a metal to be alloyed with Pd.
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