| 摘要 |
PROBLEM TO BE SOLVED: To prepare an electrification-reducing membrane capable of reducing electrification in a container housing emissive elements, hardly varying electric resistance e.g. even in an oxygen atmosphere, excellent in stability and reproducibility and useful for an image formation device, or the like by, making a nitride of both a specific transition metal and boron exist in the membrane. SOLUTION: This membrane is prepared by making a nitride (preferably having 1,000-3,000Åthickness of both a transition metal and boron which is obtained by sputtering a target made of both at least one transition metal selected from the group consisting of Cr, Ti, Ta, Mo and W and boron nitride exist in the membrane itself. The surface nitrification degree of boron, i.e., the weight ratio of (boron nitride/boron) in the nitride of both the transition metal and boron is >=60%. It is preferable to produce an image formation device containing both emissive elements and image formation members in an envelope and a spacer containing an electrification-reducing membrane having 10 nm-1μm thickness, 10-7×Va2-105Ωm resistivity and <=1% absolute value of negative temperature coefficient of resistance on the surface of a substrate material.
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