| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for rapidly and reliably evaluating a cryopump. SOLUTION: The actual measurement temperature of each of cooling parts 52 and 53 for the input heat load of each of heaters 37 and 38 is compared with a reference temperature for an input heat load when a cryopump is in an excellent performance state (a state having original performance) to evaluate a cryopump 10. Thus, the evaluating device does no need evacuate a device or the like, on which the cryopump 10 is mounted, and remarkably reduces a time required for evaluation. Further, evaluation is practicable by a parameter related only to the cryopump 10, the cryopump 10 is purely evaluated and as a result, authenticity of an evaluation result is improved, and a need for conventional re-evaluation is eliminated. This constitution rapidly and reliably evaluates the cryopump 10.
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