发明名称 |
Fluid pressure detector using a diaphragm |
摘要 |
A good quality passive-state film is formed on a gas-contact face of a diaphragm of a pressure detector using a sensor chip to prevent corrosion on, or water content emission from, or catalytic action at a gas-contact face, thereby improving production quality in a semiconductor manufacturing process and providing high accuracy pressure detection. The passive-state film is formed on the gas-contact face of the diaphragm when the diaphragm is mounted on a diaphragm base. The diaphragm base is then fixedly secured to a sensor base in which a sensor chip is housed and a pressure transmitting medium is sealed in a gap between the sensor base and the diaphragm base.
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申请公布号 |
US6116092(A) |
申请公布日期 |
2000.09.12 |
申请号 |
US19970919110 |
申请日期 |
1997.08.28 |
申请人 |
FUJIKIN INCORPORATED |
发明人 |
OHMI, TADAHIRO;DOHI, RYOSUKE;NISHINO, KOJI;IKEDA, NOBUKAZU |
分类号 |
G01L9/04;G01L9/00;G01L19/00;G01L19/06;(IPC1-7):G01L7/08 |
主分类号 |
G01L9/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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