| 摘要 |
PURPOSE:To provide a mass spectrograph not mixed with ions of different types and having the one-dimensional beam direction by providing multiple Y-rows of analysis lines linearly arranged with multiple analysis units in the Z-line direction. CONSTITUTION:An analysis unit is formed so that an ion beam having a cross section 17 passes through the center of a frame constituted of a pair of magnets 15 with different poles faced each other and a pair of electrodes 16 faced to each other in the perpendicular direction to them. The analysis units are arranged so that the magnetic field of the magnets 15 is made parallel in the Y-row direction and the electrodes 16 are made parallel in the X-line direction. An ion beam emitted from the Z-direction is two-dimensionally expanded in X, Y-directions. When the electric field is changed for each analysis line while the magnetic field is kept constant, or when the magnetic field is changed while the electric field is kept constant on the contrary, the deflection angle of the ion beam is changed. Ions having the same mass are bent in the same direction in the analysis line to form a one-dimensional beam. A small mass spectrograph requiring no scanning system or beam parallelizer can be provided. |
