PRODUCTION OF METAL OXIDE FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a thin film of a crystallized metal oxide which does not require heat treatment at a high temp. and has a relatively large film thickness, for a remarkably short time as compared to the conventional method. SOLUTION: A process for forming a thin film of a metal oxide precursor sol on the surface of a material to be coated by applying the metal oxide precursor sol obtained by using a metallic alkoxide as a main raw material on the surface of the material to be coated and a process for crystallizing the metal oxide gel by irradiating the thin film of the metal oxide gel with ultraviolet ray having <=360 nm wavelength are repeated on the surface of one material to be treated plural times.