发明名称 METHOD FOR PRODUCING MIS STRUCTURE WITH HIGH- TEMPERATURE SUPERCONDUCTOR
摘要 superconductor engineering. SUBSTANCE: method involves passing nuclear particles onto layer of high-temperature superconductor, type 123, and monitoring structure parameters in the course of its production; superconductor material is DyBa2Cu3O7-delta acted upon by ion flow at energy required for ion ingress into material through entire thickness of insulation while observing the surface all the time, and procedure is ceased as soon as metal dysprosium is detected on it. This fact can be recognized, for example, by bonding energy of basic dysprosium level. Methods for photoelectronic n-situ check of mentioned structure parameters are also proposed. Nanometric and subnanometric structures produced by mentioned methods are noted for distinct interfaces. EFFECT: improved reproducibility of structure parameters. 3 cl, 3 ex
申请公布号 RU2156016(C1) 申请公布日期 2000.09.10
申请号 RU19990100125 申请日期 1999.01.05
申请人 FIZIKO-TEKHNICHESKIJ INSTITUT IM. A.F. IOFFE RAN 发明人 MIKUSHKIN V.M.;SYSOEV S.E.;MAMUTIN V.V.;GORDEEV JU.S.
分类号 H01L39/24 主分类号 H01L39/24
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