| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm valve, which is compact and reduces parts and in which clogging caused by dusts is hard to occur. SOLUTION: This diaphragm valve is provided with a primary side flow path 8 and a secondary side flow path 9, a valve seat part 7 provided midway between the primary side flow path 8 and the secondary flow path 9, and a diaphragm valve element 3 having a diaphragm 6 disposed in the primary side flow path 8 and a diaphragm receiving body 5 provided to penetrate the center of the diaphragm 6. The diaphragm valve element 3 is provided with a constant flow rate function part, which keeps constant a flow rate from the primary side flow path 8 to the secondary side flow path 9. This constant flow rate function part has a cylinder 13, having elasticity concentrically with the valve seat part 7 arranged with a moderate clearance for the outer periphery of the valve seat part 7. Accordingly, since the cylinder 13 controls the flow path area between the cylinder 13 and the valve seat part 7 by flexure in response to a primary pressure, a reliable constant flow rate function is exhibited.
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