发明名称 |
AIR-TIGHT DEVICE, ELECTRON BEAM DEVICE, AND IMAGE FORMING DEVICE |
摘要 |
An air-tight device having an inside pressure lower than an outside pressure, comprising a plurality of plate-shaped spacers (15) which suppress the deformation of an inside form and getter materials (9) for increasing the degree of vacuum each of which is located in a space between the two plate-shaped spacers (15), whereby gas produced inside an envelope is adsorbed immediately by the getter materials (9) and the degree of vacuum inside the envelope can be maintained satisfactorily.
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申请公布号 |
WO0052728(A1) |
申请公布日期 |
2000.09.08 |
申请号 |
WO2000JP01341 |
申请日期 |
2000.03.06 |
申请人 |
CANON KABUSHIKI KAISHA;HASEGAWA, MITSUTOSHI;ARAI, YUTAKA;SHIGEOKA, KAZUYA;GOFUKU, IHACHIRO |
发明人 |
HASEGAWA, MITSUTOSHI;ARAI, YUTAKA;SHIGEOKA, KAZUYA;GOFUKU, IHACHIRO |
分类号 |
H01J29/94;(IPC1-7):H01J7/18;H01J5/03;H01J29/87;H01J31/12 |
主分类号 |
H01J29/94 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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