发明名称 AIR-TIGHT DEVICE, ELECTRON BEAM DEVICE, AND IMAGE FORMING DEVICE
摘要 An air-tight device having an inside pressure lower than an outside pressure, comprising a plurality of plate-shaped spacers (15) which suppress the deformation of an inside form and getter materials (9) for increasing the degree of vacuum each of which is located in a space between the two plate-shaped spacers (15), whereby gas produced inside an envelope is adsorbed immediately by the getter materials (9) and the degree of vacuum inside the envelope can be maintained satisfactorily.
申请公布号 WO0052728(A1) 申请公布日期 2000.09.08
申请号 WO2000JP01341 申请日期 2000.03.06
申请人 CANON KABUSHIKI KAISHA;HASEGAWA, MITSUTOSHI;ARAI, YUTAKA;SHIGEOKA, KAZUYA;GOFUKU, IHACHIRO 发明人 HASEGAWA, MITSUTOSHI;ARAI, YUTAKA;SHIGEOKA, KAZUYA;GOFUKU, IHACHIRO
分类号 H01J29/94;(IPC1-7):H01J7/18;H01J5/03;H01J29/87;H01J31/12 主分类号 H01J29/94
代理机构 代理人
主权项
地址