| 摘要 |
PROBLEM TO BE SOLVED: To form a resin layer that has not defectives such as a foreign matter, a pinhole, and material aggregation on its surface and has less degradation of a developing characteristic following time progress, by using a vacuum dry as a drying method, and exhausting gas for a prescribed time up to a specific vacuum degree as a dry condition at that time. SOLUTION: A resin composition layer 101 formed on a substrate is placed in a chamber 102, and inside of the chamber 102 is vacuumed by a vacuum pump 103 for drying. Gas in the pump 103 is evacuated and controlled by a valve 104 provided between the pump 103 and the chamber 102. In a drying method in this case, gas is evacuated for 6 sec or more up to 100 Torr vacuum degree, and then gas is evacuated speedily. This prevents pinholes from occurring and material from aggregating on the surface of a resin composition layer. In addition, even if residence time from vacuum dry to exposure is long, good patterning is allowed. |
