| 摘要 |
PROBLEM TO BE SOLVED: To enable the high-speed and highly accurate simulation of light intensity distribution. SOLUTION: A frequency computer 10 specifies the cut-off frequency of a pupil function from the mask cycle determined by the range that the proximity effect reaches. An integrating processor 11 gets the transmission cross coefficient(TCC) within the range stipulated by the cut off frequency of the pupil function by performing integration. A parameter separating processor 12 gets eigenvalues and eigenvectors by separating the variables of the transmission cross coefficient. A reverse Fourier converting processor 13 gets the inverse Fourier transformation of the eigenvectors. A light intensity distribution operating processor 14 gets the composite product of the transmission cross coefficient and the inverse Fourier transformation of the eigenvectors, by controlling the integrating processor 11, and gets light intensity distribution from the obtained composite product and the eigenvalue of the transmission cross coefficient. As a result, this performs the high-speed and accurate computation of light intensity distribution by getting the transmission cross coefficient where high- order components are omitted by removing the discretization errors, without supposing periodicity for the effective light source and the pupil function. |
